{"id":2052,"date":"2021-04-22T11:25:19","date_gmt":"2021-04-22T02:25:19","guid":{"rendered":"http:\/\/uniopt.co.jp\/?page_id=2052"},"modified":"2022-08-19T15:59:56","modified_gmt":"2022-08-19T06:59:56","slug":"abr","status":"publish","type":"page","link":"https:\/\/uniopt.co.jp\/en\/catalog\/birefringence\/abr\/","title":{"rendered":"ABR"},"content":{"rendered":"\n
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  1. Overview
    The ABR series uses a common optical path interferometer based on optical heterodyne interferometry and the Fourier analysis method to achieve high resolution and high accuracy, and is not affected by external disturbances such as vibration and air fluctuation. The ABR-10A can be equipped with an optional loading device to measure photoelastic constants<\/a>.
    **The ABR-10A and ABR-22 has been discontinued. The ABR-100 is the successor to the ABR-10A.<\/b><\/span><\/li>
  2. Simple Performance Comparison
    \n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t
    ABR-100 High-precision measurement type\"\"<\/a><\/th>\n<\/tr>\n<\/thead>\n
    <\/td>\u0394<\/td>\u03c6<\/td>\n<\/tr>\n
    Resolution<\/td>0.01 nm<\/td>0.1 deg.<\/td>\n<\/tr>\n
    0.006 deg.<\/td>\n<\/tr>\n
    Range<\/td>0 - 260 nm<\/td>\u00b1 90 deg.<\/td>\n<\/tr>\n
    0 - 150 deg.<\/td>\n<\/tr>\n
    Measurement time<\/td>Appx. 0.1 sec. \/ point<\/td>\n<\/tr>\n
    Overview<\/td>The ABR-100 can measure the birefringence of a sample (linear birefringence) and its principal axis orientation with high accuracy.<\/td>\n<\/tr>\n
    Applications<\/td>Semiconductor manufacturing equipment
    \n\u3000*Stepper lens materials
    \n\u3000*Photomask blanks
    \n\u3000*Semiconductor substrates
    \n\u3000*Crystal defect evaluation
    \nLiquid crystal
    \n\u3000*Alignment property evaluation of liquid crystal
    \n\u3000*Alignment characteristic evaluation of polymer film
    \n\u3000*Good\/failure evaluation of rubbing
    \n\u3000*Internal stress evaluation of glass substrate
    \nOptical elements
    \n\u3000*Evaluation of phase difference characteristics of waveplates
    \n\u3000Lens, prism
    \n\u3000Photoelastic constant<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/li>
  3. Configuration variation