ABR


  1. Overview
    The ABR series uses a common optical path interferometer based on optical heterodyne interferometry and the Fourier analysis method to achieve high resolution and high accuracy, and is not affected by external disturbances such as vibration and air fluctuation. The ABR-10A can be equipped with an optional loading device to measure photoelastic constants.
    **The ABR-10A has been discontinued. The ABR-100 is the successor to the ABR-10A.
  2. Simple Performance Comparison
     ABR-100
    High-precision measurement type
    ABR-22
    Simultaneous measurement of linear birefringence and circular birefringence
    ΔφΔφOptical rotation angle
    Resolution0.01 nm0.1 deg.0.4 nm0.2 deg.0.2 deg.
    0.006 deg.0.2 deg.
    Range0 - 260 nm± 90 deg.0 - 316 nm± 90 deg.± 90 deg.
    0 - 150 deg.0 - 180 deg.
    Measurement timeAppx. 0.1 sec. / pointAppx. 30 sec. / point
    OverviewThe ABR-100 can measure the birefringence of a sample (linear birefringence) and its principal axis orientation with high accuracy.The ABR-22 can simultaneously and independently measure not only birefringence and its principal axis orientation, but also the optical rotation angle. The ABR-22 is capable of quantitatively measuring various important properties of crystals, liquid crystals, and polymer materials.
    ApplicationsSemiconductor manufacturing equipment
     *Stepper lens materials
     *Photomask blanks
     *Semiconductor substrates
     *Crystal defect evaluation
    Liquid crystal
     *Alignment property evaluation of liquid crystal
     *Alignment characteristic evaluation of polymer film
     *Good/failure evaluation of rubbing
     *Internal stress evaluation of glass substrate
    Optical elements
     *Evaluation of phase difference characteristics of waveplates
     Lens, prism
     Photoelastic constant
    *Evaluation of orientation characteristics of liquid crystal cells (TN, STN, etc.)
    *Evaluation of nonlinear optical elements such as Faraday elements
    Evaluation of nonlinear optical elements such as Faraday devices ・*Evaluation of polymer materials (photo-functional polymers)

  3. Configuration variation

  4. Example of measurement pattern
    See here.