SBR-03


  1. Overview
    The SBR-03 is a birefringence measurement system based on a new measurement principle developed by Uniopt. The birefringence and principal axis orientation of a sample can be obtained simultaneously by rotating the sample while modulating the polarization state incident on it. It is characterized by its wide measurement dynamic range and high measurement resolution. (Patent No. 3844222)s-br3s
  2. Performance
     仕様複屈折位相差主軸方位角
    測定性能分解能0.05 nm (at 633 nm)0.2 deg.
    範囲0 - 180 deg.
    (0 - 316 nm at 633 nm)
    ± 90 deg.
    繰り返し精度0.06 nm (Re = 0 nm)
    0.3 nm (Re = 158 nm)
    -
    0.5 deg.
    測定速度Appx. 1 sec. / point
    光学系測定原理偏光変調回転法
    光源He-Neレーザー (λ=632.8 nm)
    オプションによりその他の波長も検討致します.
    試料ステージ系固定方法別途相談(標準走査範囲 : 50 x 50 nm以下)

Si-W0227HA 解析_BIT2
Measurement example of a silicon disk (Φ25 x 2 mm)
Si-W0227HD  解析_BIT2
Example of an externally applied load
Photoelastic birefringence can be observed.