SBR-02


  1. Overview
    The SBR-02 is based on the rotational polarizer method used in ellipsometers. The optical system is almost the same as that of the SBR-01, but by rotating the polarizer on the light source side, the birefringent phase difference and the principal axis orientation of the sample can be determined simultaneously. SBR02


  2. Perfarmance
     仕様複屈折位相差主軸方位角
    測定性能分解能0.1 deg. (0.2 nm at 633 nm)0.1 deg.
    範囲0 - 85 deg.
    (0 - 150 nm at 633 nm)
    ± 90 deg.
    繰り返し精度0.2 deg. (0.4 nm at 633 nm)0.1 deg.
    時間Appx. 3 sec. / point
    光学系測定原理回転偏光子法
    光源He-Neレーザー (λ=632.8 nm)
    オプションによりその他の波長も検討致します.
    試料ステージ系固定方法別途相談(標準走査範囲 : 50 x 50 nm以下)
    試料の主軸方位は既知(主軸方位固定)であること.