- Overview
The SBR-02 is based on the rotational polarizer method used in ellipsometers. The optical system is almost the same as that of the SBR-01, but by rotating the polarizer on the light source side, the birefringent phase difference and the principal axis orientation of the sample can be determined simultaneously.
- Perfarmance
仕様 複屈折位相差 主軸方位角 測定性能 分解能 0.1 deg. (0.2 nm at 633 nm) 0.1 deg. 範囲 0 - 85 deg.
(0 - 150 nm at 633 nm)± 90 deg. 繰り返し精度 0.2 deg. (0.4 nm at 633 nm) 0.1 deg. 時間 Appx. 3 sec. / point 光学系 測定原理 回転偏光子法 光源 He-Neレーザー (λ=632.8 nm)
オプションによりその他の波長も検討致します.試料ステージ系 固定方法 別途相談(標準走査範囲 : 50 x 50 nm以下)
試料の主軸方位は既知(主軸方位固定)であること.
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