ABR

  1. Overview
    The ABR series uses a common optical path interferometer based on optical heterodyne interferometry and the Fourier analysis method to achieve high resolution and high accuracy, and is not affected by external disturbances such as vibration and air fluctuation. The ABR-10A can be equipped with an optional loading device to measure photoelastic constants.
    **The ABR-10A and ABR-22 has been discontinued. The ABR-100 is the successor to the ABR-10A.

  2. Simple Performance Comparison
    ABR-100 High-precision measurement type
    Δφ
    Resolution0.01 nm0.1 deg.
    0.006 deg.
    Range0 - 260 nm± 90 deg.
    0 - 150 deg.
    Measurement timeAppx. 0.1 sec. / point
    OverviewThe ABR-100 can measure the birefringence of a sample (linear birefringence) and its principal axis orientation with high accuracy.
    ApplicationsSemiconductor manufacturing equipment
    　*Stepper lens materials
    　*Photomask blanks
    　*Semiconductor substrates
    　*Crystal defect evaluation
    Liquid crystal
    　*Alignment property evaluation of liquid crystal
    　*Alignment characteristic evaluation of polymer film
    　*Good/failure evaluation of rubbing
    　*Internal stress evaluation of glass substrate
    Optical elements
    　*Evaluation of phase difference characteristics of waveplates
    　Lens, prism
    　Photoelastic constant
  3. Configuration variation
  4. Example of measurement pattern
    See here.