SBR-02

  1. Overview
    The SBR-02 is based on the rotational polarizer method used in ellipsometers. The optical system is almost the same as that of the SBR-01, but by rotating the polarizer on the light source side, the birefringent phase difference and the principal axis orientation of the sample can be determined simultaneously. SBR02

  2. Perfarmance
    SpecificationRetardationAzimuth of axis
    Measurement performanceResolution0.1 deg. (0.2 nm at 633 nm)0.1 deg.
    Range0 - 85 deg.
    (0 - 150 nm at 633 nm)    		± 90 deg.
    Measurement timeAppx. 3 sec. / point
    Optical systemPrinciple of MeasurementRotating polarizer method
    SourceHe-Ne laser (λ=632.8 nm)
    Other wavelengths are available as an option.
    Sample stage
    		FoldingTo be discussed separately(Standard scanning range : < 50 x 50 nm )
    The orientation of the main axis of the sample must be known (fixed orientation).